3D interferometric measurement system for machine tool on-line control

V. Micó; M. T. Molina-Jiménez; J. Caballero-Aroca; S. Simón-Martín; E. Pérez-Picazo; A. R. Jiménez; L. Calderon; M. Calvache; F. Seco; R. Bueno

doi:10.1117/12.623755

3D interferometric measurement system for machine tool on-line control

V. Micó^*, M. T. Molina-Jiménez, J. Caballero-Aroca, S. Simón-Martín, E. Pérez-Picazo, A. R. Jiménez, L. Calderon, M. Calvache, F. Seco, R. Bueno

^*Corresponding author for this work

TECNALIA Research & Innovation

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

Original language	English
Article number	59482N
Pages (from-to)	1-8
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5948 II
DOIs	https://doi.org/10.1117/12.623755
Publication status	Published - 2005
Event	Photonics Applications in Industry and Research IV - Warsaw, Poland Duration: 30 Aug 2005 → 2 Sept 2005

Keywords

Interferometry
Laser tracking
Mechatronic
Metrology
Multi-system integration

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Micó, V., Molina-Jiménez, M. T., Caballero-Aroca, J., Simón-Martín, S., Pérez-Picazo, E., Jiménez, A. R., Calderon, L., Calvache, M., Seco, F., & Bueno, R. (2005). 3D interferometric measurement system for machine tool on-line control. Proceedings of SPIE - The International Society for Optical Engineering, 5948 II, 1-8. Article 59482N. https://doi.org/10.1117/12.623755

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title = "3D interferometric measurement system for machine tool on-line control",

abstract = "We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.",

keywords = "Interferometry, Laser tracking, Mechatronic, Metrology, Multi-system integration",

author = "V. Mic{\'o} and Molina-Jim{\'e}nez, {M. T.} and J. Caballero-Aroca and S. Sim{\'o}n-Mart{\'i}n and E. P{\'e}rez-Picazo and Jim{\'e}nez, {A. R.} and L. Calderon and M. Calvache and F. Seco and R. Bueno",

year = "2005",

doi = "10.1117/12.623755",

language = "English",

volume = "5948 II",

pages = "1--8",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Photonics Applications in Industry and Research IV ; Conference date: 30-08-2005 Through 02-09-2005",

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T1 - 3D interferometric measurement system for machine tool on-line control

AU - Micó, V.

AU - Molina-Jiménez, M. T.

AU - Caballero-Aroca, J.

AU - Simón-Martín, S.

AU - Pérez-Picazo, E.

AU - Jiménez, A. R.

AU - Calderon, L.

AU - Calvache, M.

AU - Seco, F.

AU - Bueno, R.

PY - 2005

Y1 - 2005

N2 - We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

AB - We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

KW - Interferometry

KW - Laser tracking

KW - Mechatronic

KW - Metrology

KW - Multi-system integration

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DO - 10.1117/12.623755

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AN - SCOPUS:32144442385

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VL - 5948 II

SP - 1

EP - 8

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 59482N

T2 - Photonics Applications in Industry and Research IV

Y2 - 30 August 2005 through 2 September 2005

ER -

3D interferometric measurement system for machine tool on-line control

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Keywords

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