Ceramic micro heater technology for gas sensors

Carmen Moldovan; Oana Nedelcu; Per Johander; Igor Goenaga; David Gomez; Petko Petkov; Ulrike Kaufmann; Hans Joachim Ritzhaupt-Kleissl; Robert Dorey; Katrin Persson

doi:10.1109/SMICND.2006.283967

Ceramic micro heater technology for gas sensors

Carmen Moldovan^*
, Oana Nedelcu
, Per Johander
, Igor Goenaga
, David Gomez
, Petko Petkov
, Ulrike Kaufmann
, Hans Joachim Ritzhaupt-Kleissl
, Robert Dorey
, Katrin Persson

^*Corresponding author for this work

National Institute for Research and Development in Microtechnologies Romania
RISE Research Institutes of Sweden
TEKNIKER
Cardiff University
Karlsruhe Institute of Technology
Cranfield University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Citations (Scopus)

Abstract

The paper presents the design and manufacturing steps of micro heaters, built on ceramic suspended membranes for gas sensor applications. The micro heaters are designed and fabricated by combining laser milling techniques, and conductive ceramic technology. Trenches are created in the ceramic substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The final step involves releasing the membrane by laser milling, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate. The temperature of the heater element was measured with a heat camera from FLIR 40 system comparing the case of the heater positioned on top of a released membrane and that of the non-released membrane. The simulation of the heater build on top of a released membrane was compared with the heater measurements.

Original language	English
Title of host publication	2006 International Semiconductor Conference, CAS 2006 Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	197-200
Number of pages	4
ISBN (Print)	1424401097, 9781424401093
DOIs	https://doi.org/10.1109/SMICND.2006.283967
Publication status	Published - 2006
Externally published	Yes
Event	2006 International Semiconductor Conference, CAS 2006 - Sinaia, Romania Duration: 27 Sept 2007 → 29 Sept 2007

Publication series

Name	Proceedings of the International Semiconductor Conference, CAS
Volume	1

Conference

Conference	2006 International Semiconductor Conference, CAS 2006
Country/Territory	Romania
City	Sinaia
Period	27/09/07 → 29/09/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Gas sensor
Micro heaters

Access to Document

10.1109/SMICND.2006.283967

Cite this

Moldovan, C., Nedelcu, O., Johander, P., Goenaga, I., Gomez, D., Petkov, P., Kaufmann, U., Ritzhaupt-Kleissl, H. J., Dorey, R., & Persson, K. (2006). Ceramic micro heater technology for gas sensors. In 2006 International Semiconductor Conference, CAS 2006 Proceedings (pp. 197-200). Article 4063194 (Proceedings of the International Semiconductor Conference, CAS; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMICND.2006.283967

@inproceedings{b18c4ac2cdd14688a9f3aa293871e7c9,

title = "Ceramic micro heater technology for gas sensors",

abstract = "The paper presents the design and manufacturing steps of micro heaters, built on ceramic suspended membranes for gas sensor applications. The micro heaters are designed and fabricated by combining laser milling techniques, and conductive ceramic technology. Trenches are created in the ceramic substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The final step involves releasing the membrane by laser milling, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate. The temperature of the heater element was measured with a heat camera from FLIR 40 system comparing the case of the heater positioned on top of a released membrane and that of the non-released membrane. The simulation of the heater build on top of a released membrane was compared with the heater measurements.",

keywords = "Gas sensor, Micro heaters",

author = "Carmen Moldovan and Oana Nedelcu and Per Johander and Igor Goenaga and David Gomez and Petko Petkov and Ulrike Kaufmann and Ritzhaupt-Kleissl, \{Hans Joachim\} and Robert Dorey and Katrin Persson",

year = "2006",

doi = "10.1109/SMICND.2006.283967",

language = "English",

isbn = "1424401097",

series = "Proceedings of the International Semiconductor Conference, CAS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "197--200",

booktitle = "2006 International Semiconductor Conference, CAS 2006 Proceedings",

address = "United States",

note = "2006 International Semiconductor Conference, CAS 2006 ; Conference date: 27-09-2007 Through 29-09-2007",

}

Moldovan, C, Nedelcu, O, Johander, P, Goenaga, I, Gomez, D, Petkov, P, Kaufmann, U, Ritzhaupt-Kleissl, HJ, Dorey, R & Persson, K 2006, Ceramic micro heater technology for gas sensors. in 2006 International Semiconductor Conference, CAS 2006 Proceedings., 4063194, Proceedings of the International Semiconductor Conference, CAS, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 197-200, 2006 International Semiconductor Conference, CAS 2006, Sinaia, Romania, 27/09/07. https://doi.org/10.1109/SMICND.2006.283967

Ceramic micro heater technology for gas sensors. / Moldovan, Carmen; Nedelcu, Oana; Johander, Per et al.
2006 International Semiconductor Conference, CAS 2006 Proceedings. Institute of Electrical and Electronics Engineers Inc., 2006. p. 197-200 4063194 (Proceedings of the International Semiconductor Conference, CAS; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ceramic micro heater technology for gas sensors

AU - Moldovan, Carmen

AU - Nedelcu, Oana

AU - Johander, Per

AU - Goenaga, Igor

AU - Gomez, David

AU - Petkov, Petko

AU - Kaufmann, Ulrike

AU - Ritzhaupt-Kleissl, Hans Joachim

AU - Dorey, Robert

AU - Persson, Katrin

PY - 2006

Y1 - 2006

N2 - The paper presents the design and manufacturing steps of micro heaters, built on ceramic suspended membranes for gas sensor applications. The micro heaters are designed and fabricated by combining laser milling techniques, and conductive ceramic technology. Trenches are created in the ceramic substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The final step involves releasing the membrane by laser milling, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate. The temperature of the heater element was measured with a heat camera from FLIR 40 system comparing the case of the heater positioned on top of a released membrane and that of the non-released membrane. The simulation of the heater build on top of a released membrane was compared with the heater measurements.

AB - The paper presents the design and manufacturing steps of micro heaters, built on ceramic suspended membranes for gas sensor applications. The micro heaters are designed and fabricated by combining laser milling techniques, and conductive ceramic technology. Trenches are created in the ceramic substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The final step involves releasing the membrane by laser milling, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate. The temperature of the heater element was measured with a heat camera from FLIR 40 system comparing the case of the heater positioned on top of a released membrane and that of the non-released membrane. The simulation of the heater build on top of a released membrane was compared with the heater measurements.

KW - Gas sensor

KW - Micro heaters

UR - https://www.scopus.com/pages/publications/43549089927

U2 - 10.1109/SMICND.2006.283967

DO - 10.1109/SMICND.2006.283967

M3 - Conference contribution

AN - SCOPUS:43549089927

SN - 1424401097

SN - 9781424401093

T3 - Proceedings of the International Semiconductor Conference, CAS

SP - 197

EP - 200

BT - 2006 International Semiconductor Conference, CAS 2006 Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2006 International Semiconductor Conference, CAS 2006

Y2 - 27 September 2007 through 29 September 2007

ER -

Ceramic micro heater technology for gas sensors

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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