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Compact LED based nanoimprinter for UV-NIL
Ali Z. Khokhar
, Ainhoa Gaston
, Isabel Obieta
, Nikolaj Gadegaard
*
*
Corresponding author for this work
TECNALIA Research & Innovation
University of Glasgow
Foundation TECNALIA Research & Innovation
Research output
:
Contribution to journal
›
Article
›
peer-review
5
Citations (Scopus)
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Engineering
Nanoimprint Lithography
100%
Photoresist
66%
Infrastructure
33%
Silicon Substrate
33%
Nanometre
33%
Light-Emitting Diode
33%
Hydrogel
33%
Laminar Flows
33%
Clean Rooms
33%
Material Science
Lithography
100%
Silicon
33%
Hydrogel
33%
Reactive Ion Etching
33%
Light-Emitting Diode
33%
Laminar Flows
33%