Fast, robust and simple all optical far-field nano-positioning measurements

  • M. L. Juan
  • , N. Tischler
  • , I. Fernandez-Corbaton
  • , X. Zambrana-Puyalto
  • , X. Vidal
  • , G. Molina-Terriza

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a novel method for the nano-positioning measurements of a sample. Based on symmetry considerations, the method transforms the problem of position sensing into identification of topologically robust features obtained from the scattered field. In particular, we exploit the cylindrical symmetry of a control defect appended to the sample. Experimentally, we demonstrate a precision of 10 nm (λ/60) which is limited by the stability of our mechanical set-up, rather than the fundamental resolution of the technique. This far field method provides a deeply sub-wavelength precision and the possibility of rapidly retrieving the initial zero position. In addition, we envision that the principles of the technique could be adapted to other measurements and variety sample geometries.

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Pages412-415
Number of pages4
Publication statusPublished - 2013
Externally publishedYes
EventNanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013 - Washington, DC, United States
Duration: 12 May 201316 May 2013

Publication series

NameTechnical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Volume2

Conference

ConferenceNanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Country/TerritoryUnited States
CityWashington, DC
Period12/05/1316/05/13

Keywords

  • Nano-optics
  • Nano-positioning
  • Scattering

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