Generation of Lossy Mode Resonances in Planar Waveguides Toward Development of Humidity Sensors

Lossy mode resonances (LMRs) are typically obtained with optical fibre. The Kretschmann configuration is an alternative but LMRs are generated with angles approaching grazing incidence. In this work, a new setup is explored, based on the lateral incidence of light on conventional planar waveguides such as glass slides or coverslips. Indium tin oxide was deposited onto both types of waveguides generating LMRs. The results of the simulations carried out agree well with the experimental results. As an example of the potential of this new and simple optical configuration, a humidity sensor with a sensitivity of 0.212 nm/% relative humidity (RH) in the range from 65% to 90% of RH was developed, which expedites the development of other types of sensors already explored with LMR-based optical fibre sensors.