@inproceedings{ca0b8c0ea65341668c23c3ce9be11e68,
title = "High response time micro scale thermo-couple for biological applications",
abstract = "We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2×2μm area. Our micro TFTC shows a simulated response time of 0.35ms when used in air (for ΔT ≈ 58K), and 1.5ms when used in water (for ΔT ≈ 41K).",
keywords = "Glass support, Response time, Thin film thermo-couple",
author = "F. Gillot and A. Tixier-Mita and F. Mor{\'i}n and H. Fujita",
year = "2006",
doi = "10.1109/MMB.2006.251508",
language = "English",
isbn = "1424403383",
series = "Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology",
pages = "127--130",
booktitle = "Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology",
note = "2006 International Conference on Microtechnologies in Medicine and Biology ; Conference date: 09-05-2006 Through 12-05-2006",
}
