High response time micro scale thermo-couple for biological applications

F. Gillot; A. Tixier-Mita; F. Morín; H. Fujita

doi:10.1109/MMB.2006.251508

High response time micro scale thermo-couple for biological applications

F. Gillot^*
, A. Tixier-Mita
, F. Morín
, H. Fujita

^*Corresponding author for this work

The University of Tokyo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2×2μm area. Our micro TFTC shows a simulated response time of 0.35ms when used in air (for ΔT ≈ 58K), and 1.5ms when used in water (for ΔT ≈ 41K).

Original language	English
Title of host publication	Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology
Pages	127-130
Number of pages	4
DOIs	https://doi.org/10.1109/MMB.2006.251508
Publication status	Published - 2006
Externally published	Yes
Event	2006 International Conference on Microtechnologies in Medicine and Biology - Okinawa, Japan Duration: 9 May 2006 → 12 May 2006

Publication series

Name	Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology

Conference

Conference	2006 International Conference on Microtechnologies in Medicine and Biology
Country/Territory	Japan
City	Okinawa
Period	9/05/06 → 12/05/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Glass support
Response time
Thin film thermo-couple

Access to Document

10.1109/MMB.2006.251508

Cite this

Gillot, F., Tixier-Mita, A., Morín, F., & Fujita, H. (2006). High response time micro scale thermo-couple for biological applications. In Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology (pp. 127-130). Article 4281326 (Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology). https://doi.org/10.1109/MMB.2006.251508

@inproceedings{ca0b8c0ea65341668c23c3ce9be11e68,

title = "High response time micro scale thermo-couple for biological applications",

abstract = "We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2×2μm area. Our micro TFTC shows a simulated response time of 0.35ms when used in air (for ΔT ≈ 58K), and 1.5ms when used in water (for ΔT ≈ 41K).",

keywords = "Glass support, Response time, Thin film thermo-couple",

author = "F. Gillot and A. Tixier-Mita and F. Mor{\'i}n and H. Fujita",

year = "2006",

doi = "10.1109/MMB.2006.251508",

language = "English",

isbn = "1424403383",

series = "Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology",

pages = "127--130",

booktitle = "Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology",

note = "2006 International Conference on Microtechnologies in Medicine and Biology ; Conference date: 09-05-2006 Through 12-05-2006",

}

Gillot, F, Tixier-Mita, A, Morín, F & Fujita, H 2006, High response time micro scale thermo-couple for biological applications. in Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology., 4281326, Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology, pp. 127-130, 2006 International Conference on Microtechnologies in Medicine and Biology, Okinawa, Japan, 9/05/06. https://doi.org/10.1109/MMB.2006.251508

High response time micro scale thermo-couple for biological applications. / Gillot, F.; Tixier-Mita, A.; Morín, F. et al.
Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology. 2006. p. 127-130 4281326 (Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High response time micro scale thermo-couple for biological applications

AU - Gillot, F.

AU - Tixier-Mita, A.

AU - Morín, F.

AU - Fujita, H.

PY - 2006

Y1 - 2006

N2 - We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2×2μm area. Our micro TFTC shows a simulated response time of 0.35ms when used in air (for ΔT ≈ 58K), and 1.5ms when used in water (for ΔT ≈ 41K).

AB - We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2×2μm area. Our micro TFTC shows a simulated response time of 0.35ms when used in air (for ΔT ≈ 58K), and 1.5ms when used in water (for ΔT ≈ 41K).

KW - Glass support

KW - Response time

KW - Thin film thermo-couple

UR - https://www.scopus.com/pages/publications/35548959280

U2 - 10.1109/MMB.2006.251508

DO - 10.1109/MMB.2006.251508

M3 - Conference contribution

AN - SCOPUS:35548959280

SN - 1424403383

SN - 9781424403387

T3 - Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology

SP - 127

EP - 130

BT - Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology

T2 - 2006 International Conference on Microtechnologies in Medicine and Biology

Y2 - 9 May 2006 through 12 May 2006

ER -

High response time micro scale thermo-couple for biological applications

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Fingerprint

Cite this