@inproceedings{975c02c8ae7440c78fcbe93c956294af,
title = "High sensitivity extrinsic Fabry-P{\`e}rot interferometer for humidity sensing",
abstract = "In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-P{\'e}rot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20\% to 90\%, which implies a sensitivity of 1.27 nm/\%RH.",
keywords = "Fabry-P{\`e}rot, humidity sensor, interferometer, tin oxide",
author = "J. Ascorbe and C. Sanz and Corres, \{J. M.\} and Arregui, \{F. J.\} and Matias, \{I. R.\} and Mukhopadhyay, \{S. C.\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 9th International Conference on Sensing Technology, ICST 2015 ; Conference date: 08-12-2015 Through 11-12-2015",
year = "2016",
month = mar,
day = "21",
doi = "10.1109/ICSensT.2015.7438380",
language = "English",
series = "Proceedings of the International Conference on Sensing Technology, ICST",
publisher = "IEEE Computer Society",
pages = "143--146",
booktitle = "2015 9th International Conference on Sensing Technology, ICST 2015",
address = "United States",
}