Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel

M. T. Rodrigo; C. Jiménez; L. Vázquez; F. Alonso; M. Fernández; J. M. Martínez-Duart

doi:10.1557/JMR.1998.0296

Influence of nitrogen implantation on the properties of Ti and substoichiometric TiN_x films deposited on high speed steel

M. T. Rodrigo^*
, C. Jiménez
, L. Vázquez
, F. Alonso
, M. Fernández
, J. M. Martínez-Duart

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Ti and TiN_x (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N⁺ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N⁺ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N⁺-implanted Ti coatings show lower values of hardness than reactive sputtered TiN_x films. α-Ti, ∈-Ti₂N, and δ-TiN phases were identified by grazing x-ray diffraction.

Original language	English
Pages (from-to)	2117-2122
Number of pages	6
Journal	Journal of Materials Research
Volume	13
Issue number	8
DOIs	https://doi.org/10.1557/JMR.1998.0296
Publication status	Published - Aug 1998

Access to Document

10.1557/JMR.1998.0296

Cite this

@article{09d3624a11304ebfbc48768a1618348c,

title = "Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel",

abstract = "Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ∈-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction.",

author = "Rodrigo, \{M. T.\} and C. Jim{\'e}nez and L. V{\'a}zquez and F. Alonso and M. Fern{\'a}ndez and Mart{\'i}nez-Duart, \{J. M.\}",

year = "1998",

month = aug,

doi = "10.1557/JMR.1998.0296",

language = "English",

volume = "13",

pages = "2117--2122",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Springer International Publishing AG",

number = "8",

}

TY - JOUR

T1 - Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel

AU - Rodrigo, M. T.

AU - Jiménez, C.

AU - Vázquez, L.

AU - Alonso, F.

AU - Fernández, M.

AU - Martínez-Duart, J. M.

PY - 1998/8

Y1 - 1998/8

N2 - Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ∈-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction.

AB - Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ∈-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction.

UR - https://www.scopus.com/pages/publications/0032137987

U2 - 10.1557/JMR.1998.0296

DO - 10.1557/JMR.1998.0296

M3 - Article

AN - SCOPUS:0032137987

SN - 0884-2914

VL - 13

SP - 2117

EP - 2122

JO - Journal of Materials Research

JF - Journal of Materials Research

IS - 8

ER -

Influence of nitrogen implantation on the properties of Ti and substoichiometric TiN_x films deposited on high speed steel

Abstract

Access to Document

Other files and links

Fingerprint

Cite this