Laser writing of metallic nanostructures in a polymer matrix with applications to metamaterials

  • Shobha Shukla*
  • , Xavier Vidal
  • , Edward P. Furlani
  • , Mark T. Swihart
  • , Paras N. Prasad
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a novel laser-based method for fabricating metallic nanostructures in a polymer matrix with sub-wavelength resolution. The method involves two-photon lithography (TPL) in which a femtosecond-pulsed laser induces two-photon initiated in situ reduction of a metal salt and simultaneous polymerization of a negative photoresist. We discuss details of the laser writing process and demonstrate various fabricated functional structures along with simulations of their electromagnetic behavior.

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Pages96-99
Number of pages4
Publication statusPublished - 2011
Externally publishedYes
EventNanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 - Boston, MA, United States
Duration: 13 Jun 201116 Jun 2011

Publication series

NameTechnical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Volume2

Conference

ConferenceNanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Country/TerritoryUnited States
CityBoston, MA
Period13/06/1116/06/11

Keywords

  • Laser writing of subwavelength metallic structures
  • Nanofabrication
  • Plasmonic nanostructures
  • Polymer metamaterials
  • Two photon lithography

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