Abstract
With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.
| Original language | English |
|---|---|
| Pages (from-to) | 1057-1061 |
| Number of pages | 5 |
| Journal | Microelectronic Engineering |
| Volume | 87 |
| Issue number | 5-8 |
| DOIs | |
| Publication status | Published - May 2010 |
Keywords
- Flash imprint
- HSQ
- PEG
- UV-NIL