TY - GEN
T1 - Optical fiber vacuum sensor based on modal interferometer and PDMS coating
AU - Ascorbe, Joaquin
AU - Fuentes, Omar
AU - Corres, Jesus M.
AU - Arregui, Francisco J.
AU - Matias, Ignacio R.
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/10
Y1 - 2019/10
N2 - This work studies the behavior of polydimethylsiloxane (PDMS) as a transducer for optical vacuum pressure measurements. The optical structure chosen for this device is a modal interferometer achieved by splicing a coreless multimode optical fiber between two single mode fibers. Then, an etching process is applied to the obtained device, in order to decrease the diameter of the fiber and increase the sensitivity. Finally, the fiber is coated by dip-coating with a layer of PDMS, which changes its volume with pressure changes. The device has been studied in the 1x10-3 mbar to 10 mbar range with a wavelength shift of 4 nm. A maximum sensitivity of 35 nm/mbar was obtained. The simple fabrication process, which can be applied to more sensitive structures, suggest that PDMS can be a good choice for the development of optical fiber vacuum sensors.
AB - This work studies the behavior of polydimethylsiloxane (PDMS) as a transducer for optical vacuum pressure measurements. The optical structure chosen for this device is a modal interferometer achieved by splicing a coreless multimode optical fiber between two single mode fibers. Then, an etching process is applied to the obtained device, in order to decrease the diameter of the fiber and increase the sensitivity. Finally, the fiber is coated by dip-coating with a layer of PDMS, which changes its volume with pressure changes. The device has been studied in the 1x10-3 mbar to 10 mbar range with a wavelength shift of 4 nm. A maximum sensitivity of 35 nm/mbar was obtained. The simple fabrication process, which can be applied to more sensitive structures, suggest that PDMS can be a good choice for the development of optical fiber vacuum sensors.
KW - PDMS
KW - modal interferometer
KW - optical fiber
KW - polydimethylsiloxane
KW - vacuum sensor
UR - https://www.scopus.com/pages/publications/85078701496
U2 - 10.1109/SENSORS43011.2019.8956488
DO - 10.1109/SENSORS43011.2019.8956488
M3 - Conference contribution
AN - SCOPUS:85078701496
T3 - Proceedings of IEEE Sensors
BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th IEEE Sensors, SENSORS 2019
Y2 - 27 October 2019 through 30 October 2019
ER -