Abstract
This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.
| Original language | English |
|---|---|
| Article number | 012026 |
| Journal | Journal of Physics: Conference Series |
| Volume | 773 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 14 Dec 2016 |
| Externally published | Yes |
| Event | 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France Duration: 6 Dec 2016 → 9 Dec 2016 |
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