TY - JOUR
T1 - Optimization of power output in planar thermoelectric microgenerators based on Si nanowires
AU - Calaza, C.
AU - Donmez, I.
AU - Salleras, M.
AU - Gadea, G.
AU - Santos, J. D.
AU - Morata, A.
AU - Tarancón, A.
AU - Fonseca, L.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2016/12/14
Y1 - 2016/12/14
N2 - This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.
AB - This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.
UR - https://www.scopus.com/pages/publications/85009816121
U2 - 10.1088/1742-6596/773/1/012026
DO - 10.1088/1742-6596/773/1/012026
M3 - Conference article
AN - SCOPUS:85009816121
SN - 1742-6588
VL - 773
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012026
T2 - 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016
Y2 - 6 December 2016 through 9 December 2016
ER -