Power Response of a Planar Thermoelectric Microgenerator Based on Silicon Nanowires at Different Convection Regimes

A thermoelectric microgenerator based on multiple silicon nanowire arrays is fabricated and its performance evaluated for different convection regimes. Mature silicon microfabrication technology is used to fabricate the device structure. As a post-process, a bottom-up approach is used to grow silicon nanowires by a VLS-CVD mechanism. The thermal design of the microgenerator features a thermally isolated silicon platform which is connected to the bulk silicon rim through several arrays of silicon nanowires. Simulations are carried out to evaluate the need of an external heat sink to improve the thermal gradient seen by the nanowires and the power output of the microgenerator. Results show a significant improvement with a heat sink raising the thermal gradient from 3 K to approximately 100 K when the external temperature gradient is 300 K. Experimental measurements with different convection regimes also show a radical improvement on the power output comparing natural convection and two different forced convection regimes. The first forced convection regime is a broad airflow from a commercial CPU fan placed on top of the device, while the second (air jet forced convection) uses a syringe to focus the airflow from the compressed air line to the platform. The maximum output power for a natural convection regime is 2.2 nW for a hotplate temperature of 200 °C, while the air jet forced convection regime generates up to 700 nW, which correspond to 35 μW/cm2 considering a device footprint of 2 mm2.