Smart integration of Si NWs arrays in all-silicon thermoelectric micronanogenerators

  • Luis Fonseca
  • , Carlos Calaza
  • , Marc Salleras
  • , Inci Donmez
  • , José Domingo Santos
  • , Gerard Gadea
  • , Alex Morata
  • , Albert Tarancón
  • , Alberto Roncaglia
  • , Luca Belsito
  • , Dario Narducci
  • , Laura Zulian

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work two alternative approaches are introduced for automatically integrating large numbers of several μms long Si NWs in lateral thermoelectric devices. Both cases being planar require a thermally isolated platform to be defined by silicon micromachining. This opens the path to all-silicon thermal harvesters, which can be built in large volumes offering a cost-effective energy harvesting solution where thermal gradients are present.

Original languageEnglish
Title of host publicationSmart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
EditorsT. Gessner
PublisherVerlag Wissenschaftliche Scripten
Pages384-387
Number of pages4
ISBN (Electronic)9783957350404
Publication statusPublished - 2016
Externally publishedYes
EventSmart Systems Integration 2016 - 10th International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 - Munich, Germany
Duration: 9 Mar 201610 Mar 2016

Publication series

NameSmart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016

Conference

ConferenceSmart Systems Integration 2016 - 10th International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
Country/TerritoryGermany
CityMunich
Period9/03/1610/03/16

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