Abstract
The effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction ) force of the resist film before and after plasma treatment with the presence of nitrogen and hydrogen gases. The wettability was studied to estimate surface energy of the films both with polar and dispersion components. The AFM-based microtribometer enabled to study the frictional behavior of the resist films. The results of these extended studies have shown that the used plasma functionalization is effective to modify dramatically the surface properties of the resist films.
| Original language | English |
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| Pages | 81-86 |
| Number of pages | 6 |
| Publication status | Published - 2011 |
| Event | 6th International Scientific Conference on Tribology, BALTTRIB 2011 - Kaunas, Lithuania Duration: 17 Nov 2011 → 19 Nov 2011 |
Conference
| Conference | 6th International Scientific Conference on Tribology, BALTTRIB 2011 |
|---|---|
| Country/Territory | Lithuania |
| City | Kaunas |
| Period | 17/11/11 → 19/11/11 |
Keywords
- Adhesion
- Friction
- Resist films
- Surface energy