Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

Alberto García-Luis; Pablo Corengia; Daniel González-Santamaría; Marta Brizuela; Iñigo Braceras; Nerea Briz; Patxi Azpiroz; Victor Bellido-González; Sarah Powell

doi:10.1002/ppap.200731901

Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

Alberto García-Luis^*, Pablo Corengia, Daniel González-Santamaría, Marta Brizuela, Iñigo Braceras, Nerea Briz, Patxi Azpiroz, Victor Bellido-González, Sarah Powell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O₂/N₂/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.

Original language	English
Pages (from-to)	S766-S770
Journal	Plasma Processes and Polymers
Volume	4
Issue number	SUPPL.1
DOIs	https://doi.org/10.1002/ppap.200731901
Publication status	Published - 2007

Keywords

Hexamethyldisiloxane (HMDSO)
Indentation
Infrared absorption spectroscopy (IR-AS)
Optical properties
Plasma polymerization
Wettability

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10.1002/ppap.200731901

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title = "Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source",

abstract = "Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.",

keywords = "Hexamethyldisiloxane (HMDSO), Indentation, Infrared absorption spectroscopy (IR-AS), Optical properties, Plasma polymerization, Wettability",

author = "Alberto Garc{\'i}a-Luis and Pablo Corengia and Daniel Gonz{\'a}lez-Santamar{\'i}a and Marta Brizuela and I{\~n}igo Braceras and Nerea Briz and Patxi Azpiroz and Victor Bellido-Gonz{\'a}lez and Sarah Powell",

year = "2007",

doi = "10.1002/ppap.200731901",

language = "English",

volume = "4",

pages = "S766--S770",

journal = "Plasma Processes and Polymers",

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TY - JOUR

T1 - Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

AU - García-Luis, Alberto

AU - Corengia, Pablo

AU - González-Santamaría, Daniel

AU - Brizuela, Marta

AU - Braceras, Iñigo

AU - Briz, Nerea

AU - Azpiroz, Patxi

AU - Bellido-González, Victor

AU - Powell, Sarah

PY - 2007

Y1 - 2007

N2 - Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.

AB - Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.

KW - Hexamethyldisiloxane (HMDSO)

KW - Indentation

KW - Infrared absorption spectroscopy (IR-AS)

KW - Optical properties

KW - Plasma polymerization

KW - Wettability

UR - http://www.scopus.com/inward/record.url?scp=70349411684&partnerID=8YFLogxK

U2 - 10.1002/ppap.200731901

DO - 10.1002/ppap.200731901

M3 - Article

AN - SCOPUS:70349411684

SN - 1612-8850

VL - 4

SP - S766-S770

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - SUPPL.1

ER -

Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

Abstract

Keywords

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