3D interferometric measurement system for machine tool on-line control

V. Micó; M. T. Molina-Jiménez; J. Caballero-Aroca; S. Simón-Martín; E. Pérez-Picazo; A. R. Jiménez; L. Calderon; M. Calvache; F. Seco; R. Bueno

doi:10.1117/12.623755

3D interferometric measurement system for machine tool on-line control

V. Micó^*, M. T. Molina-Jiménez, J. Caballero-Aroca, S. Simón-Martín, E. Pérez-Picazo, A. R. Jiménez, L. Calderon, M. Calvache, F. Seco, R. Bueno

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Resumen

We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

Idioma original	Inglés
Número de artículo	59482N
Páginas (desde-hasta)	1-8
Número de páginas	8
Publicación	Proceedings of SPIE - The International Society for Optical Engineering
Volumen	5948 II
DOI	https://doi.org/10.1117/12.623755
Estado	Publicada - 2005
Evento	Photonics Applications in Industry and Research IV - Warsaw, Polonia Duración: 30 ago 2005 → 2 sept 2005

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Micó, V., Molina-Jiménez, M. T., Caballero-Aroca, J., Simón-Martín, S., Pérez-Picazo, E., Jiménez, A. R., Calderon, L., Calvache, M., Seco, F., & Bueno, R. (2005). 3D interferometric measurement system for machine tool on-line control. Proceedings of SPIE - The International Society for Optical Engineering, 5948 II, 1-8. Artículo 59482N. https://doi.org/10.1117/12.623755

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title = "3D interferometric measurement system for machine tool on-line control",

abstract = "We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.",

keywords = "Interferometry, Laser tracking, Mechatronic, Metrology, Multi-system integration",

author = "V. Mic{\'o} and Molina-Jim{\'e}nez, {M. T.} and J. Caballero-Aroca and S. Sim{\'o}n-Mart{\'i}n and E. P{\'e}rez-Picazo and Jim{\'e}nez, {A. R.} and L. Calderon and M. Calvache and F. Seco and R. Bueno",

year = "2005",

doi = "10.1117/12.623755",

language = "English",

volume = "5948 II",

pages = "1--8",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Photonics Applications in Industry and Research IV ; Conference date: 30-08-2005 Through 02-09-2005",

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TY - JOUR

T1 - 3D interferometric measurement system for machine tool on-line control

AU - Micó, V.

AU - Molina-Jiménez, M. T.

AU - Caballero-Aroca, J.

AU - Simón-Martín, S.

AU - Pérez-Picazo, E.

AU - Jiménez, A. R.

AU - Calderon, L.

AU - Calvache, M.

AU - Seco, F.

AU - Bueno, R.

PY - 2005

Y1 - 2005

N2 - We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

AB - We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

KW - Interferometry

KW - Laser tracking

KW - Mechatronic

KW - Metrology

KW - Multi-system integration

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U2 - 10.1117/12.623755

DO - 10.1117/12.623755

M3 - Conference article

AN - SCOPUS:32144442385

SN - 0277-786X

VL - 5948 II

SP - 1

EP - 8

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 59482N

T2 - Photonics Applications in Industry and Research IV

Y2 - 30 August 2005 through 2 September 2005

ER -

3D interferometric measurement system for machine tool on-line control

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