@inproceedings{ca124896ad084db2b24ee35b06eb7b70,
title = "Fabrication of patterned ferromagnetic shape memory thin films",
abstract = "We report two possible routes of fabrication of large surfaces of ferromagnetic shape memory antidots with tunable pore size and center-to-center distances. By using the drop coating method, we have prepared a large area of 2D arrays (typically 1cm2) of polystyrene spheres (PS) (1.4±0.1μ m diameter) on a Si substrate. We have used reactive ion etching with a gas mixture of O2 (12sccm) and Ar (5sccm) to reduce the diameter of the PS spheres whereby controlling the size of pores. The film deposition was performed on a substrate heated at 500°C (route 1) and at room temperature with subsequent annealing in a furnace at 500°C for 4 hours (route 2). Route 1 proved to be promising but more work is needed to optimize it. The antidots of Ni-Mn-Ga obtained along route 2 are ferromagnetic with a Curie temperature \textasciitilde{}100°C, and a spread martensitic transformation (between -100°C and -30°C).",
keywords = "Martensitic Transformation, Ni-Mn-Ga Antidots, Patterning, Silicon Substrate",
author = "P. {\'A}lvarez-Alonso and A. P{\'e}rez-Checa and Aseguinolaza, \{I. R.\} and J. Alonso and Svalov, \{A. V.\} and Chernenko, \{V. A.\} and Barandiar{\'a}n, \{J. M.\}",
note = "Publisher Copyright: {\textcopyright} 2015 Trans Tech Publications, Switzerland.; 4th International Conference on Materials and Applications for Sensors and Transducers, MAST 2014 ; Conference date: 08-06-2014 Through 11-06-2014",
year = "2015",
doi = "10.4028/www.scientific.net/KEM.644.219",
language = "English",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "219--222",
editor = "Jon Gutierez and Barandiaran, \{Jos{\'e} Manuel\} and Evangelos Hristoforou and Dimitrios Vlachos",
booktitle = "Proceedings of the 4th International Conference on Materials and Applications for Sensors and Transducers",
}