Influence of Surface Roughness on Nanocrystalline Diamond Films Deposited by Distributed Antenna Array Microwave System on TA6V Substrates

In this study, the characteristics of nanocrystalline diamond films synthesized at low surface temperature on Ti-6Al-4V (TA6V) substrates using a distributed antenna array microwave reactor aiming at biomedical applications were investigated. The surface roughness of the TA6V substrates is varied by scratching with emery paper of 1200, 2400, 4000 polishing grit. Nanocrystalline diamond (NCD) coatings with morphology, purity, and microstructure comparable to those obtained on silicon substrates usually employed in the same reactor and growth conditions are successfully achieved whatever the polishing protocol. However, the latter has a significant effect on the roughness parameters and hardness of the NCD films. The use of the finest polishing grit thus permits us to enhance the hardness value, which can be related to the work-hardening phenomenon arising from the polishing process.