TY - GEN
T1 - Micro Sized Interdigital Capacitor for Gases Detection Based on Graphene Oxide Coating
AU - Vitoria, Ignacio
AU - Armas, Dayron
AU - Coronel, Carlos
AU - Algarra, Manuel
AU - Zamarreño, Carlos Ruiz
AU - Matias, Ignacio R.
AU - Mukhopadhyay, Subhas C.
N1 - Publisher Copyright:
© 2023, The Author(s), under exclusive license to Springer Nature Switzerland AG.
PY - 2023
Y1 - 2023
N2 - A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10–1 pF/% v/v for CO2 and R2 = 0.972 and 1.433·10–1 pF/ppb for NO.
AB - A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10–1 pF/% v/v for CO2 and R2 = 0.972 and 1.433·10–1 pF/ppb for NO.
KW - Gas Sensor
KW - Graphene Oxide
KW - Interdigital
KW - Photolithography
UR - https://www.scopus.com/pages/publications/85159454596
U2 - 10.1007/978-3-031-29871-4_4
DO - 10.1007/978-3-031-29871-4_4
M3 - Conference contribution
AN - SCOPUS:85159454596
SN - 9783031298707
T3 - Lecture Notes in Electrical Engineering
SP - 24
EP - 30
BT - Sensing Technology - Proceedings of ICST’15
A2 - Suryadevara, Nagender Kumar
A2 - George, Boby
A2 - Jayasundera, Krishanthi P.
A2 - Mukhopadhyay, Subhas Chandra
PB - Springer Science and Business Media Deutschland GmbH
T2 - 15th International Conference on Sensing Technology, ICST 2022
Y2 - 5 December 2022 through 7 December 2022
ER -