Resumen
With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.
Idioma original | Inglés |
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Páginas (desde-hasta) | 1057-1061 |
Número de páginas | 5 |
Publicación | Microelectronic Engineering |
Volumen | 87 |
N.º | 5-8 |
DOI | |
Estado | Publicada - may 2010 |