TY - JOUR
T1 - Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source
AU - García-Luis, Alberto
AU - Corengia, Pablo
AU - González-Santamaría, Daniel
AU - Brizuela, Marta
AU - Braceras, Iñigo
AU - Briz, Nerea
AU - Azpiroz, Patxi
AU - Bellido-González, Victor
AU - Powell, Sarah
PY - 2007
Y1 - 2007
N2 - Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.
AB - Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.
KW - Hexamethyldisiloxane (HMDSO)
KW - Indentation
KW - Infrared absorption spectroscopy (IR-AS)
KW - Optical properties
KW - Plasma polymerization
KW - Wettability
UR - http://www.scopus.com/inward/record.url?scp=70349411684&partnerID=8YFLogxK
U2 - 10.1002/ppap.200731901
DO - 10.1002/ppap.200731901
M3 - Article
AN - SCOPUS:70349411684
SN - 1612-8850
VL - 4
SP - S766-S770
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
IS - SUPPL.1
ER -